Funder
TÜBİTAK
Academy of Finland
TÜBA
European Research Council
Reference81 articles.
1. In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon;Tokel;Nat. Photonics,2017
2. I. Pavlov, E. Dülgergil, E. Ilbey, and F. Ö. Ilday, 10 W, 10 ns, 50 kHz all-fiber laser at 1.55 µm, in Conference on Lasers and Electro-Optics 2012, Washington, D.C.: OSA, 2012, p. CTu2M.5. doi: 10.1364/CLEO_SI.2012.CTu2M.5.
3. Inscription of optical waveguides in crystalline silicon by mid-infrared femtosecond laser pulses;Nejadmalayeri;Opt. Lett.,2005
4. Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses;Öktem;Nat. Photonics,2013
5. In-volume laser direct writing of silicon—challenges and opportunities;Chambonneau;Laser Photon Rev.,2021
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