Surface topography and subsurface structure evolution in laser micro polishing of monocrystalline silicon-Reference-Cited by-同舟云学术

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Surface topography and subsurface structure evolution in laser micro polishing of monocrystalline silicon

Published:2024-10 Issue: Volume:177 Page:111068
ISSN:0030-3992
Container-title:Optics & Laser Technology
language:en
Short-container-title:Optics & Laser Technology

Author:

Huang Weiqi,Li Tao,Long Gui,Lin Chuangting,Huang Kai,Zheng Zhengding,Xiao Junfeng,Zhang Jianguo,Xu Jianfeng

Funder

Ministry of Education of the People's Republic of China

National Natural Science Foundation of China

Huazhong University of Science and Technology

Publisher

Elsevier BV

Reference42 articles.

1. K. Ni, X. Cheng, B. Huang, S. Liu, J. Shao, Z. Wu, J. Chen and M. Huang, Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy, Appl. Sci. 9(9)(2019) 1819. Doi: 10.3390/app9091819.

2. C. Xu, X. Peng, J. Liu, H. Hu, T. Lai, Q. Yang and Y. Xiong, A High Efficiency and Precision Smoothing Polishing Method for NiP Coating of Metal Mirror, Micromachines 13(8)(2022) 1171. Doi: 10.3390/mi13081171.

3. Overview of key technologies for optical manufacturing of lithographic projection lens;Dai;J. Mech. Eng.,2013

4. Laser polishing of tool steel with CO2 laser and high-power diode laser;Ukar;Int. J. Mach. Tool. Manu.,2010

5. Laser polishing and laser shape correction of optical glass;Weingarten;J. Laser Appl.,2017

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