Laser diagnostics of nanoscale dielectric films on transparent substrate by integrating differential reflectivity and ellipsometry
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference25 articles.
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4. Optical diagnostics for thin film processing;Herman,1996
5. Changes in the phase and amplitude of polarized light reflected from a film-covered surface and their relations with the film thickness;Saxena;J Opt Soc Am,1965
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