Microstructure of SiC deposited from methyltrichlorosilane
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference30 articles.
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3. Chlorine and oxygen inhibition effects in the deposition of SiC-based ceramics from the Si–C–H–Cl system;Lespiaux;J. Eur. Ceram. Soc.,1995
4. Effect of diluent gases on growth behavior and characteristics of chemically vapor deposited silicon carbide films;Kim;J. Am. Ceram. Soc.,1999
5. Hydrogen chloride effects on the CVD of silicon carbide from methyltrichlorosilane;Papasouliotis;Adv. Mater.- CVD,1998
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