Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry

Published:2013-12 Issue:23-24 Volume:257 Page:3282-3296
ISSN:0010-8545
Container-title:Coordination Chemistry Reviews
language:en
Short-container-title:Coordination Chemistry Reviews

Author:

Emslie David J.H.,Chadha Preeti,Price Jeffrey S.

Funder

Intel Corporation

Semiconductor Research Corporation

Publisher

Elsevier BV

Subject

Materials Chemistry,Physical and Theoretical Chemistry,Inorganic Chemistry

Reference188 articles.

1. Chemical Vapour Deposition: Precursors Processes and Applications;Jones,2009

2. Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

3. The Surface Chemistry of Atomic Layer Depositions of Solid Thin Films

4. Advances in the deposition chemistry of metal-containing thin films using gas phase processes

5. Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition

Cited by 60 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The surface chemistry of the atomic layer deposition of metal thin films;Nanotechnology;2024-06-18

2. Plasma electron characterization in electron chemical vapor deposition;Journal of Vacuum Science & Technology A;2024-02-21

3. Low-temperature atomic layer deposition as an advanced fabrication technique of semiconductor polymer materials;Semiconducting Polymer Materials for Biosensing Applications;2024

4. Profile control in conductor metal wet etch with advanced photoresists;Advances in Patterning Materials and Processes XL;2023-05-01

5. Wide temperature operation of piezoelectric sensors for detecting precursor levels in a canister;Measurement Science and Technology;2023-03-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3