Funder
Deutsche Forschungsgemeinschaft
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces
Reference41 articles.
1. Laser Processing and Chemistry;Bäuerle,2011
2. Femtosecond laser micromilling of Si wafers;Lee;Appl. Surf. Sci.,2008
3. Excimer laser micromachining and replication of 3D optical surfaces;Braun;Appl. Surf. Sci.,1998
4. Excimer laser machining for 3D-surface structuring;Zimmer,2003
5. Nano- and microstructuring of SiO2 and sapphire with Fs-laser induced selective etching;Horstmann-Jungemann;J. Laser Micro Nanoeng.,2009