The chip manufacturing industry: Environmental impacts and eco-efficiency analysis-Reference-Cited by-同舟云学术

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The chip manufacturing industry: Environmental impacts and eco-efficiency analysis

Published:2023-02 Issue: Volume:858 Page:159873
ISSN:0048-9697
Container-title:Science of The Total Environment
language:en
Short-container-title:Science of The Total Environment

Author:

Ruberti Marcello

Publisher

Elsevier BV

Subject

Pollution,Waste Management and Disposal,Environmental Chemistry,Environmental Engineering

Reference41 articles.

1. Semiconductor lithography - technology overview;Adak,2021

2. Life Cycle Assessment in Semiconductor Foundry;Ahmad,2007

3. Life cycle assessment of integrated circuit packaging technologies;Andrae;Int. J. Life Cycle Assess.,2011

4. Czochralski growth of silicon crystals;Anttila,2020

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1. Dry cleaning of InSb surfaces by hydrogen molecule exposure in ultrahigh vacuum;Applied Surface Science;2024-12

2. Simultaneous removal of fluorine and dissolved silica from semiconductor wastewater by an in-situ crystal nucleation method towards near-zero liquid discharge;Desalination;2024-10

3. A Novel End-to-End Deep Learning Framework for Chip Packaging Defect Detection;Sensors;2024-09-08

4. A novel route for urea abatement in UPW production: Pre-chlorination/VUV/UV under acidic circumstances and its enhancement mechanisms;Journal of Hazardous Materials;2024-08

5. Socio-environmental implications of the decarbonization of copper and lithium mining and mineral processing;Resources Policy;2024-08

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