Effect of doped niobium pentoxide on structure and properties of hafnium oxide films deposited by ion beam assisted deposition

Author:

Lv Xiaocheng,Wei Yuquan,Liu Guiling,Huang Zhengren,Yang YongORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Annealing influence on optical performance of HfO2 thin films;Khan;J. Alloys Compd.,2020

2. Comparison of damage and ablation dynamics of multilayer dielectric films initiated by few-cycle pulses versus longer femtosecond pulses;Talisa;Opt Lett.,2020

3. The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method;Harthcock;Appl. Phys. Lett.,2019

4. Fabrication and performances of double-sided HfO2 anti-reflection films with ultra-high infrared transmittance;Gu;J. Alloys Compd.,2021

5. APS bias voltage on properties of HfO2 laser films deposited by reactive plasma ion assisted electron evaporation;Fu;J. Inorg. Mater.,2017

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