Investigation on morphology and chemistry of the Beilby layer on polished fused silica
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference46 articles.
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4. Surface and subsurface damage of fused quartz glass induced by shear-thickening polishing;Surface Topography: Metrology and Properties;2024-01-31
5. Smoothing of fused silica with less damage by a hybrid plasma process combining isotropic etching and atom-migration;Surfaces and Interfaces;2023-10
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