Toward deeper ultraviolet detection: Atomic layer deposited amorphous AlGaOx thin film detector with its tunable optical properties and opto-electronic responses
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Published:2024-06
Issue:11
Volume:50
Page:19856-19863
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ISSN:0272-8842
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Container-title:Ceramics International
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language:en
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Short-container-title:Ceramics International
Author:
Liu Weiming,
Zhu XudanORCID,
Ding Yifan,
Tang Hongyu,
Xu Peiran,
Huang Tiantian,
Zheng Yuxiang,
Chen Xin,
Zhang RongjunORCID