1. A novel slurry for chemical mechanical polishing of single crystal diamond;Liao;Appl. Surf. Sci.,2021
2. Doping strategy on properties and chemical mechanical polishing performance of CeO2 Abrasives: a DFT assisted experimental study;Ma;Appl. Surf. Sci.,2023
3. Environment-friendly electrochemical mechanical polishing using solid polymer electrolyte/CeO2 composite pad for highly efficient finishing of 4H-SiC (0001) surface;Murata;Appl. Surf. Sci.,2023
4. Revealing the mechanisms for inactive rolling and wear behaviour on chemical mechanical planarization;Nguyen;Appl. Surf. Sci.,2022
5. High efficient polishing of sliced 4H-SiC (0001) by molten KOH etching;Zhang;Appl. Surf. Sci.,2020