Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS
-
Published:2024-09
Issue:17
Volume:50
Page:31576-31588
-
ISSN:0272-8842
-
Container-title:Ceramics International
-
language:en
-
Short-container-title:Ceramics International
Author:
Gui BinhuaORCID,
Hu Hanjun,
Zhou Hui,
Zhang Tengfei,
Liu XingguangORCID,
Ma Zhanji,
Xian Changwei