Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications-Reference-Cited by-同舟云学术

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Ultra-Precision Float Polishing of Calcium Fluoride Single Crystals for Deep Ultra Violet Applications

Published:2004 Issue:1 Volume:53 Page:459-462
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Namba Y.,Ohnishi N.,Yoshida S.,Harada K.,Yoshida K.,Matsuo T.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference15 articles.

1. Excimer Lasers at 30 Years;Ewing;Optics & Photonics News,2003

2. UV Lasers: effects and applications in materials science;Duley,1996

3. The Development of 157nm Small Field and Mid-Field MicroSteppers;Miller;Proc. SPIE,2000

4. Optical and Surface Physical Characteristics of Diamond-Machined Infrared Windows;Decker;NBS Spec. Publ,1979

5. Ultra-Fine Finishing of Sapphire Single Crystal;Namba;Annals of the CIRP,1977

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