Author:
Prakash Shaurya,Yeom Junghoon
Reference175 articles.
1. Rapid prototyping of microfluidic systems in poly(dimethylsiloxane);Duffy;Anal Chem,1998
2. Lithography enabling for the 65 nm node gate layer patterning with alternating PSM—optical microlithography XVIII;Tritchkov;Proc SPIE,2005
3. Novel solution for in-die phase control under scanner equivalent optical settings for 45-nm node and below;Perlitz;Proc SPIE,2007
4. Reduction of mask induced CD errors by optical proximity correction;Randall;Proc SPIE Int Soc Opt Eng,1998
5. Resolution for off-axis illumination;Sheppard;J Opt Soc Am A,1998
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