Advances of materials science in MEMS applications: A review
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Elsevier BV
Reference170 articles.
1. Internal resonance in a MEMS levitation force resonator;Zamanzadeh;Nonlinear Dynam.,2022
2. Nanoporous carbon-based wearable hybrid biosensing patch for real-time and in vitro healthcare monitoring;Zahed,2022
3. Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: a review;Manvi;Microelectron. Eng.,2022
4. Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method;Hong;Microsystems & Nanoengineering,2023
5. Sensitivity enhancement of microelectromechanical sensors using femtosecond laser for biological and chemical applications;Al‐Gawati;Surf. Interface Anal.,2022
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