Contact resistivity of Re, Pt and Ta films on n-type β-SiC: Preliminary results-Reference-Cited by-同舟云学术

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Contact resistivity of Re, Pt and Ta films on n-type β-SiC: Preliminary results

Published:1995-01 Issue:1-3 Volume:29 Page:185-189
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Chen J.S.,Bächli A.,Nicolet M.-A.,Baud L.,Jaussaud C.,Madar R.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference15 articles.

1. Electrical Contacts to Beta Silicon Carbide Thin Films

2. Amorphous and Crystalline Silicon Carbide II;Geib,1989

3. Amorphous and Crystalline Silicon Carbide IV;Crofton,1992

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