XPS spectra of thin CNx films prepared by chemical vapor deposition-Reference-Cited by-同舟云学术

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XPS spectra of thin CNx films prepared by chemical vapor deposition

Published:1999-03 Issue:2-5 Volume:8 Page:591-594
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Beshkov G,Dimitrov D.B,Georgiev St,Juan-Cheng D,Petrov P,Velchev N,Krastev V

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4

2. Predicting Useful Materials

3. Reactive sputtering of carbon and carbide targets in nitrogen

4. Structure and bonding studies of the C:N thin films produced by rf sputtering method

5. Analytical electron microscopy and Raman spectroscopy studies of carbon nitride thin films

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