Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films-Reference-Cited by-同舟云学术

Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films

Published:2003-10 Issue:1-2 Volume:359 Page:158-167
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Shen Y.G

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference26 articles.

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2. Chemical Vapor Deposition of Tungsten Carbide, Molybdenum Carbide Nitride, and Molybdenum Nitride Films

3. The influence of argon pressure on the structure of sputtered molybdenum: From porous amorphous to a new type of highly textured film

4. Preparation of molybdenum nitrides by laser-promoted nitridation reaction

5. Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion

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