Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Author:

Guzman PabloORCID,Dinh Toan,Phan Hoang-Phuong,Joy Abbin Perunnilathil,Qamar Afzaal,Bahreyni Behraad,Zhu YongORCID,Rais-Zadeh Mina,Li Huaizhong,Nguyen Nam-TrungORCID,Dao Dzung Viet

Funder

Queensland Microtechnology Facility

Australian National Fabrication Facility

National Collaborative Research Infrastructure Strategy

Griffith Universities Joint Development Agreement

Foundation for Australia-Japan Studies under the Rio Tinto Australia-Japan Collaboration Project

Australian Research Council

Griffith University/Simon Fraser University

Griffith University

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference46 articles.

1. Resonant sensor for high accuracy pressure measurement using silicon technology;Parsons;IEEE Aerosp. Electron. Syst. Mag.,1992

2. Silicon microring resonators;Bogaerts;Laser Photonics Rev.,2012

3. Piezoelectric mass-sensing devices as biosensors -an alternative to optical biosensors?;Andreas;Angew. Chemie Int. Ed.,2000

4. Surface microscopy with laserless MEMS based afm probes;Algré;Proc. IEEE Int. Conf. Micro Electro Mech. Syst.,2010

5. Electro-thermally actuated silicon carbide Tuneable MEMS devices;Mastropaolo;J. Microelectr.,2012

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