Investigation on powder metallurgy Cr–Si–Ta–Al alloy target for high-resistance thin film resistors with low temperature coefficient of resistance
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,General Mathematics
Reference15 articles.
1. Preparation of anatase TiO2 thin films by vacuum arc plasma evaporation;Miyata;Thin Solid Films,2006
2. Effects of thickness and composition on the resistivity of Cu–MgF2 cermet thin film resistors;Katumba;J Mater Sci,2000
3. Fabrication of CeO2 thin film on quartz glass and MgO(100) by electron beam evaporation;Noriaki;Solid State Ionics,2004
4. Materials science of thin films: deposition and structure;Milton,2002
5. Microstructure and electrical characteristics of Cr–Si–Ni films deposited on glass and Si(100) substrates by RF magnetron sputtering;Zhang;Mater Sci Eng B,2004
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