Nitrogen doping of polycrystalline, LPCVD 3C-SiC thin films using alternating supply deposition
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Published:2025-10
Issue:
Volume:197
Page:109663
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Moll PhilippORCID,
Pfusterschmied Georg,
Leitgeb Markus,
Schmid Ulrich
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