Investigation of morphological surface features, wetting behavior and mechanical traits under various substrate temperatures for beta iron disilicide prepared via facing-targets sputtering-Reference-Cited by-同舟云学术

Investigation of morphological surface features, wetting behavior and mechanical traits under various substrate temperatures for beta iron disilicide prepared via facing-targets sputtering

Published:2022-08 Issue: Volume:146 Page:106604
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Charoenyuenyao Peerasil,Chaleawpong Rawiwan,Borwornpornmetee Nattakorn,Paosawatyanyong Boonchoat,Sittimart Phongsaphak^ORCID,Yoshitake Tsuyoshi,Promros Nathaporn^ORCID

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference55 articles.

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3. Influence of annealing temperature on mechanical and wetting properties of β-FeSi2 films built using facing-targets direct-current sputtering;Charoenyuenyao;J. Nanosci. Nanotechnol.,2020

4. Near-infrared photodetection of n-type β-FeSi2/intrinsic Si/p-type Si heterojunctions at low temperatures;Promros;Jpn. J. Appl. Phys.,2012

5. Production of p-type Si/n-type β-FeSi2 heterojunctions using facing-targets direct-current sputtering and evaluation of their resistance and interface state density;Chaleawpong;Phys. Status Solidi,2018

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3. Impedance characteristics under different voltages of n-β-FeSi2/p-Si heterojunctions constructed via facing target sputtering;Materials Science in Semiconductor Processing;2023-10

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