Influence of the annealing schemes on the formation and stability of Ni(Pt)Si thin films: Partial, laser, total, and one-step annealings
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Published:2024-12
Issue:
Volume:184
Page:108806
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Morris Anak FabriziofrancoORCID,
Campos Andréa,
Grégoire Magali,
Estellon Adrien,
Lombard Marc,
Guyot Thomas,
Guillemin Sophie,
Mangelinck Dominique