Anisotropic etching of the silicon crystal-surface free energy model
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference30 articles.
1. The influence of atomic configuration of (h k l) planes on adsorption processes associated with anisotropic etching of silicon
2. Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions
3. Silicon anisotropic etching in KOH-isopropanol etchant
4. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
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