Compressively strained epitaxial Ge layers for quantum computing applications
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Published:2024-05
Issue:
Volume:174
Page:108231
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Shimura YosukeORCID,
Godfrin Clement,
Hikavyy Andriy,
Li Roy,
Aguilera Juan,
Katsaros Georgios,
Favia Paola,
Han Han,
Wan Danny,
De Greve Kristiaan,
Loo Roger
Cited by
1 articles.
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