Phase-crossing algorithm for white-light fringes analysis-Reference-Cited by-同舟云学术

Phase-crossing algorithm for white-light fringes analysis

Published:2006-04 Issue:1 Volume:260 Page:68-72
ISSN:0030-4018
Container-title:Optics Communications
language:en
Short-container-title:Optics Communications

Author:

Pawłowski Michał E.,Sakano Youhei,Miyamoto Yoko,Takeda Mitsuo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. White-Light Interferometric Thickness Gauge

2. N. Tanaka, M. Takeda, K. Matsumoto, Interferometrically measuring the physical properties of test object, United States Patent 4,072,422 (filed October 20 1976, issued February 7, 1978).

3. Three-dimensional sensing of rough surfaces by coherence radar

4. See, for example K. Nishi, H. Haneishi, Computer-based white-light fringe analysis for film thickness measurement,” Thesis, Univ. Electro-Communications, 1984, 1985.

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