Depth profile analyses with sub 100-nm depth resolution of a metal thin film by femtosecond - laser ablation - inductively coupled plasma - time-of-flight mass spectrometry
Author:
Funder
ETH Zürich
Publisher
Elsevier BV
Subject
Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference43 articles.
1. Determination of depth resolution from measured sputtering profiles of multilayer structures: equations and approximations;Hofmann;Surf. Interface Anal.,1986
2. Depth resolution in sputter profiling revisited;Hofmann;Surf. Interface Anal.,2016
3. Structural characteristics of samarium oxynitride on silicon substrate;Goh;J. Alloys Compd.,2017
4. Hot wire chemical vapor deposited multiphase silicon carbide (SiC) thin films at various filament temperatures;Pawbake;J. Mater. Sci. Mater. Electron.,2016
5. Structural studies of n-type nc-Si–QD thin films for nc-Si solar cells;Das;J. Phys. Chem. Solids,2017
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