Optical emission spectroscopy diagnostics for plasma parameters investigation in a Duo-Plasmaline surface-wave sustained discharge

Author:

Rachdi Lazhar,Sushkov Vladimir,Hofmann Marc

Funder

Bundesministerium für Wirtschaft und Energie

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference49 articles.

1. Duo-plasmaline, a surface wave sustained linearly extended discharge;Räuchle;J. Phys. IV France,1998

2. PECVD Processes with Increased Deposition Speed with Linear Microwave Plasma Sources. 4 pages/25th European Photovoltaic Solar Energy Conference and Exhibition/5th World Conference on Photovoltaic Energy Conversion, 6–10 September 2010, Valencia, Spain;Mehlich,2010

3. Contribution of surface-wave (SW) sustained plasma columns to the modeling of RF and microwave discharges with new insight into some of their features. A survey of other types of SW discharges;Moisan;Plasma Sources Sci. Technol.,2018

4. Plasma-Based Surface Modification Technologies for Crystalline Silicon Photovoltaics;Seiffe,2013

5. Ultrathin plasma oxide for passivation of phosphorus-diffused silicon solar cell emitters;Okasha;IEEE J. Photovolt.,2020

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