The magnetron-activated deposition process

Author:

Reschke J.,Goedicke K.,Schiller S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference12 articles.

1. Proc. 7th Int. Conf. on Vacuum Web Coating;Schiller,1993

2. Proc. 8th Int. Conf. on Vacuum Web Coating;Affinito,1994

3. Proc. 8th Int. Conf. on Vacuum Web Coating;Staffetti,1994

4. Proc. 37th Annu. Technical Conf. on SVC;Schiller,1994

5. Proc. 36th Annu. Technical Conf. on SVC;Schiller,1993

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3. Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films;Materials Science Forum;1998-08

4. Ion Plating and Ion Beam Assisted Deposition;Handbook of Physical Vapor Deposition (PVD) Processing;1998

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