Influence of residual compressive stress on erosion behavior of arc evaporation titanium nitride coating
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Effect of crystallographic orientation on erosion characteristics of arc evaporation titanium nitride coating
2. Internal stress and adherence of titanium nitride coatings
3. Prediction and Measurement of Compressive and Tensile Stresses in Coatings Of Tic and Tin Chemically Vapour Deposited on Various Substrates
4. Characteristics of dc magnetron, reactively sputtered TiNx films for diffusion barriers in III–V semiconductor metallization
5. Mechanisms of reactive sputtering of titanium nitride and titanium carbide III: Influence of substrate bias on composition and structure
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