Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(Al Ga1−)2O3 films-Reference-Cited by-同舟云学术

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Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(Al Ga1−)2O3 films

Published:2015-08 Issue: Volume:424 Page:77-79
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Wakabayashi Ryo,Oshima Takayoshi^ORCID,Hattori Mai,Sasaki Kohei,Masui Takekazu,Kuramata Akito,Yamakoshi Shigenobu,Yoshimatsu Kohei,Ohtomo Akira

Funder

Japan Society for the Promotion of Science

Ministry of Education, Culture, Sports, Science and Technology

Nippon Sheet Glass Foundation for Materials Science and Engineering

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference24 articles.

1. Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2̄01);Jia;Appl. Phys. Lett.,2015

2. Deep-ultraviolet transparent conductive β-Ga2O3 thin films;Orita;Appl. Phys. Lett.,2000

3. Ga2O3 thin film growth on c-plane sapphire substrates by molecular beam epitaxy for deep-ultraviolet photodetectors;Oshima;Jpn. J. Appl. Phys.,2007

4. Electrical conductivity and carrier concentration control in β-Ga2O3 by Si doping;Víllora;Appl. Phys. Lett.,2008

5. Device-quality β-Ga2O3 epitaxial films fabricated by ozone molecular beam epitaxy;Sasaki;Appl. Phys. Express,2012

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1. Demonstration of β-(Al_xGa_1−x)₂O₃/β-Ga₂O₃ superlattice growth by mist chemical vapor deposition;Japanese Journal of Applied Physics;2024-09-02

2. Enhancing the mechanical strength of β - Ga2O3 with Al alloying;Physical Review Applied;2024-06-14

3. Crystallographic and band structure analysis of β-(AlxGa1−x)2O3/β-(InyGa1−y)2O3 thin film grown on β-Ga2O3 substrate via mist CVD;AIP Advances;2024-04-01

4. Study of β-Ga2O3 Ceramics Synthesized under Powerful Electron Beam;Materials;2023-11-01

5. (AlxGa1-x)2O3-based materials: Growth, properties, and device applications;Journal of Alloys and Compounds;2023-10

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