Deep ultraviolet emission of ZnO films prepared by RF magnetron sputtering at changing substrate temperature
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
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3. Effects of Substrate Temperature and Sputtering Power on the Optical and Electrical Properties of Al-doped Zinc Oxide Thin Films by Reactive RF Magnetron Sputtering;CHEM ENGINEER TRANS;2015
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