High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. Investigation of electron mobility and saturation velocity limits in gallium nitride using uniaxial dielectric continuum model;Park;J. Appl. Phys.,2017
2. Two-dimensional electron-gas AlN/GaN heterostructures with extremely thin AlN barriers;Smorchkova;Appl. Phys. Lett.,2000
3. High-mobility window for two-dimensional electron gases at ultrathin AlN∕GaN heterojunctions;Cao;Appl. Phys. Lett.,2007
4. AlN/GaN metal–insulator–semiconductor high-electron-mobility transistor with thermal atomic layer deposition AlN gate dielectric;Zhang;Jpn. J. Appl. Phys.,2018
5. Stress engineering during metalorganic chemical vapor deposition of AlGaN/GaN distributed Bragg reflectors;Waldrip;Appl. Phys. Lett.,2001
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