Fabrication and characterization of ITO thin film resistance temperature detector

Author:

Wang YanleiORCID,Zhang CongchunORCID,Li JuanORCID,Ding Guifu,Duan Li

Funder

Aviation Industry Corporation of China

Shanghai Jiao Tong University

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference22 articles.

1. A study on the fabrication of an RTD by using Pt thin film;Kim;Korean J. Chem. Eng.,2001

2. MEMS-based Pt film temperature sensor on an alumina substrate;Han;Mater. Lett.,2014

3. High temperature stability of indium tin oxide thin films;.Gregory;Thin Solid Films,2002

4. Experimental set up of a magnetoelectric measuring system operating at different temperatures;Gil;J. Phys. Conf. Ser.,2016

5. An apparent n to p transition in reactively sputtered indium–tin–oxide high temperature strain gages;.Gregory;Thin Solid Films,2002

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