Experimental and numerical study of MEMS electrothermal actuators: Comparing dynamic behavior and heat transfer process in vacuum and non-vacuum environments
Author:
Funder
Fundamental Research Funds for the Central Universities
Southeast University
National Natural Science Foundation of China
Publisher
Elsevier BV
Reference34 articles.
1. Review of electrothermal actuators and applications;Potekhina;Actuators,2019
2. Control of a novel 2-dof MEMS nanopositioner with electrothermal actuation and sensing;Rakotondrabe;IEEE Trans. Control Syst. Technol.,2013
3. High-power optical microswitch based on direct fiber actuation;Cochran;Sensors Actuators A,2005
4. Thermo-mechanical fluid–structure interaction numerical modelling and experimental validation of MEMS electrothermal actuators for aqueous biomedical applications;Sciberras;Micromachines,2023
5. Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell;Majidi Fard-Vatan;Microelectron. Eng.,2020
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