Modification of Cl doping efficiency in transparent ZnO electrode films by tuning deposition temperature-Reference-Cited by-同舟云学术

Modification of Cl doping efficiency in transparent ZnO electrode films by tuning deposition temperature

Published:2024-04 Issue: Volume:222 Page:113086
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Pham Anh Tuan Thanh^ORCID,Phan Trang Thuy Thi,Nguyen Vu Huynh,Vo Nhi Hoang Phan,Hoang Dung Van,Nguyen Truong Huu,Le Oanh Kieu Truong,Park Sungkyun,Phan Thang Bach,Tran Vinh Cao

Funder

Viet Nam National University Ho Chi Minh City

Vietnam National University University of Science

Publisher

Elsevier BV

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4. Structural, optical, and electrical properties of hafnium–aluminum–zinc-oxide films grown by atomic layer deposition for TCO applications;Krajewski;ACS Omega,2023

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