Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference55 articles.
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3. Effects of N2-content on formation behavior in AlN thin films studied by NEXAFS: theory and experiment;Supruangnet;J. Alloys Compd.,2020
4. A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing;Mwema;Mater. Today Proc.,2019
5. Realization of preferential (100) oriented AlN thin films on Mo coated Si substrate using reactive RF magnetron sputtering;Das;Appl. Surf. Sci.,2021
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