Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating
Author:
Funder
Vetenskapsrådet
Knut och Alice Wallenbergs Stiftelse
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference28 articles.
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4. Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition;Lee;Thin Solid Films,2010
5. Paradigm shift in thin-film growth by magnetron sputtering: from gas-ion to metal-ion irradiation of the growing film;Greczynski;J. Vac. Sci. Technol., A,2019
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