Diagnostics of microwave ECR generated plasma: Effect of contaminated reference electrode
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. Design of high density plasma sources for materials processing;Lieberman,1994
2. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition
3. Langmuir probe diagnostics of microwave electron cyclotron resonance (ECR) plasma
4. Measurements of electron energy distribution function and neutral gas temperature;Li,2006
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