Comparison of a-C:N:H layers grown at the anode and cathode in RF-PACVD processing
Author:
Funder
AGH-UST
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference27 articles.
1. Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane-nitrogen atmospheres;Motta;J. Non-Cryst. Solids,2004
2. A role of parameters in RF PA CVD technology of a-C: N:H layers;Kyzioł;Vacuum,2008
3. Interface features of carbon nitrided films deposited on Si substrate;Liu;Vacuum,2016
4. Study of adhesion of carbon nitride thin films on medical alloy substrates;Marton;Vacuum,2010
5. Synthesis and optical characterization of amorphous carbon nitride thin films by hot filament assisted RF plasma CVD;Kundoo;Vacuum,2003
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nitrogen-modified a-C:H layers applied for light emitting diodes;Vacuum;2022-11
2. Optical method for homogeneity testing of thin films electrodes for photovoltaic cells;PRZEGLĄD ELEKTROTECHNICZNY;2022-09-05
3. Thermo-optical properties of hydrogenated amorphous carbon and nitrogen-modified carbon layers from in situ ellipsometric studies;Journal of Materials Research and Technology;2020-03
4. Adhesion of hydrogenated amorphous carbon films on ferrous alloy by intermediate nitrogen plasma treatment in silicon-containing interlayers;Vacuum;2019-09
5. Structural and optical characterization of carbon nitride layers deposited by plasma assisted chemical vapor deposition at various conditions;Thin Solid Films;2018-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3