A monolithically-integrated transistor microphone: Modelling and theoretical behaviour-Reference-Cited by-同舟云学术

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A monolithically-integrated transistor microphone: Modelling and theoretical behaviour

Published:1993-06 Issue: Volume:37-38 Page:666-673
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schellin R.,Mohr R.

Publisher

Elsevier BV

Reference17 articles.

1. A subminiature condenser microphone with silicon nitride membrane and silicon backplate;Hohm;J. Acoust. Soc. Am.,1989

2. A silicon subminiature electric microphone;Sprenkels,1988

3. A silicon condenser microphone with a silicon nitride diaphragm and back-plate;Scheeper;MME'92, 3rd European Workshop Micromachining, Micromechanics and Microsystems,1992

4. Piezoelecktrische Sensoren auf Siliziumbasis für akustische Anwendungen;Franz,1988

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