Author:
Lammerink Theo S.J.,Elwenspoek Miko,Fluitman Jan H.J.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. The resonistor: a frequency selective device utilizing the mechanical resonance of a silicon substrate;Wilfinger;IBM J. Res. Dev.,1968
2. Integrated thermally excited resonant diaphragm pressure sensor;Lammerink;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA. U.S.A.,1985
3. Electrothermally excited silicon beam mechanical resonators;Ohtman;Electron. Lett.,1987
4. Performance of thermally excited resonators;Lammerink;Sensors and Actuators,1990
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23 articles.
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