High-sensivity 2-D flow sensor with an etched thermal isolation structure-Reference-Cited by-同舟云学术

High-sensivity 2-D flow sensor with an etched thermal isolation structure

Published:1990-06 Issue:1-3 Volume:22 Page:425-430
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

van Oudheusden B.W.,van Herwaarden A.W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Fast-response silicon flow sensor with an on-chip fluid temperature sensing element;Tabata;IEEE Trans. Electron Devices.,1986

2. A monolithic gas flow sensor with polyimide as thermal insulator;Stemme;IEEE Trans. Electron Devices,1986

3. Design and packaging of a highly sensitive micro-transducer for air flow and differential pressure sensing applications;Johnson;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,11141985

4. High-precision, high-performance mass-flow sensor with integrated laminar flow micro-channels;Petersen;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,11141985

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