Author:
Biebl M.,Scheiter T.,Hierold C.,Philipsborn H.v.,Klose H.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Fabrication technology for an integrated surface-micromachined sensor;Core;Solid State Technol.,1993
2. Fabrication of micromechanical devices from polysilicon films with smooth surfaces;Guckel;Sensors and Actuators,1989
3. A new approach for the fabrication of micromechanical structures;Parameswaran;Sensors and Actuators,1989
4. H. Guckel, J.J. Sniegowski and T.R. Christenson, Advances in processing techniques for silicon micromechanical devices with smooth surfaces, Proc. IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, June 6–9, 1989, pp. 71-75
5. Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms;Legtenberg;Sensors and Actuators A,1994
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