Analysis on twin-mass structure for a piezoresistive accelerometer-Reference-Cited by-同舟云学术

Analysis on twin-mass structure for a piezoresistive accelerometer

Published:1992-08 Issue:2 Volume:34 Page:101-107
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shaoqun Shen,Jian Chen,Minhang Bao

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Semiconductor accelerometer for automobile control;Tsugai;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

2. Silicon pressure sensors and accelerometer with four-terminal-gauge utilizing the shear stress;Kanda;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. A monolithic accelerometer with integral air damping and overrange protection;Barth;IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA,691988

4. A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation;Sandmaier;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

5. Accelerometer system with self-testable features;Allen;Sensors and Acutators,1989

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