Author:
Burns D.W.,Zook J.D.,Horning R.D.,Herb W.R.,Guckel H.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Design and fabrication of the polysilicon resonating beam force transducer;Sniegowski,1991
2. Silicon pressure sensor integrates resonant strain gauge on diaphragm;Ikeda;Sensors and Actuators,1990
3. K. Petersen, F. Pourahmadi, J. Brown, P. Parsons, M. Skinner and J. Tudor, Resonant beam pressure sensor fabricated with silicon fusion bonding, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24–28 June 1991, pp. 664–667
4. H. Guckel, C. Rypstat, M. Nesnidal, J.D. Zook, D.W. Burns and D.K. Arch, Polysilicon resonant microbeam technology for high-performance sensor applications, IEEE Solid-State Sensor and Actuator Worshop, Hilton Head Island, SC, USA, 24–25 June, 1992, pp. 153–156
5. Characteristics of polysilicon resonant microbeams;Zook;Sensors and Actuators A,1992
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