Influence of the concentration of ZrCl4 on texture, morphology and growth rate of CVD grown α-Al2O3 coatings deposited by the AlCl3/ZrCl4/H2/CO2/H2S process-Reference-Cited by-同舟云学术

Influence of the concentration of ZrCl4 on texture, morphology and growth rate of CVD grown α-Al2O3 coatings deposited by the AlCl3/ZrCl4/H2/CO2/H2S process

Published:2006-03 Issue:11 Volume:200 Page:3626-3632
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Mårtensson Per

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference21 articles.

1. Proc. 3rd Eur. Conf.;Lindström,1980

2. Preparation of alumina coatings by chemical vapour deposition

3. Chemical vapour deposition of Al2O3 on TiO

4. Chemical vapour deposition of alumina on cutting tool inserts from AlCl3-H2-CO2 mixtures: Influence of the chemical vapour deposition parameters and the nature of the inserts on the morphology and wear resistance of the coatings

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