Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation-Reference-Cited by-同舟云学术

Optical, electrical and mechanical properties of TiN thin film obtained from a TiO2 sol-gel coating and rapid thermal nitridation

Published:2021-05 Issue: Volume:413 Page:127089
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Valour Arnaud,Higuita Maria Alejandra Usuga,Guillonneau Gaylord,Crespo-Monteiro Nicolas,Jamon Damien,Hochedel Marion,Michalon Jean-Yves,Reynaud Stéphanie,Vocanson Francis,Jiménez Carmen,Langlet Michel,Donnet Christophe,Jourlin Yves

Funder

Universite de Lyon

Centre National de la Recherche Scientifique

Region Auvergne-Rhone-Alpes

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference41 articles.

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4. Characterization of reactively evaporated TiN layers for diffusion barrier applications;Gagnon;J. App. Phys.,1994

5. Conductivity and the Hall coefficient of nanostructured titanium nitride films;Andrievski;Tech. Phys. Lett.,2004

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