Ion-beam assisted synthesis and thermal oxidation of TiN thin films combined with in-situ, depth-resolved characterization using MeV ions
Author:
Funder
Swedish Foundation for Strategic Research
Swedish Research Council
Publisher
Elsevier BV
Reference36 articles.
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3. SIGMA: a set-up for in-situ growth, material modification and analysis by ion beams;Kantre;Nucl. Instr. Meth. Phys. Res. B,2020
4. Combination of in-situ ion beam analysis and thermal desorption spectroscopy for studying deuterium implanted in tungsten;Kantre;Phys. Scr.,2021
5. Oxygen mobility in yttrium hydride films studied by isotopic labelling;Moldarev;EPJ Web Conf.,2022
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