Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique-Reference-Cited by-同舟云学术

Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique

Published:2023-05 Issue: Volume:460 Page:129401
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Hirata Yuki,Kawai Kotaro,Kato Toyohiro,Fujimoto Hayata,Tameno Yuto,Ishikawa Takumi,Matsuoka Hiroshige,Akasaka Hiroki,Ohtake Naoto

Funder

Japan Society for the Promotion of Science

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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